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        Horizontal PECVD (Two-In-One)
        
    
        
        
        PRODUCTS AND SERVICES > Horizontal Furnaces Series > Horizontal PECVD (Two-In-One) 
        
        
        
            
        
                
        
                    



        
            
        
        

        
    
                
        
            
        
            
        
                
        
    
        
                    
          
                                    
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                                Horizontal PECVD (Two-In-One)                            
        
                        
        
                        
        AlOx+SiN deposition.
        
                                            
        
                    
        
                        
        
                                                                                                            
        
                                            
        
                                    
        
                
        
            
        
        
        
        
        
            
        
                
    

        
                                        
        Equipment Name:
        Horizontal PECVD (Two-In-One)

        Equipment Model:
        PD-520/PD-520L/PD-520MAX

        Equipment Application:
        AlOx+SiN deposition.

        Features:

        1、The AIOx & SiN layers can be coated in the same furnace tube which helps in reducing the process steps,improving the yield and lowering the breakage rate effectively.  
        2、Optimal throughout solution: two-in-one configuration. 

        Parameters: